Deep-learning-based visual inspection of facets and p-sides for efficient quality control of diode lasers (2023)
- Semiconductor Manufacture
Christof Zink, Michael Ekterai, Dominik Martin, William Clemens, Angela Maennel, Konrad Mundinger, Lorenz Richter, Paul Crump, Andrea Knigge
The optical inspection of the surfaces of diode lasers, especially the p-sides and facets, is an essential part of the quality control in the laser fabrication procedure. With reliable, fast, and flexible optical inspection processes, it is possible to identify and eliminate defects, accelerate device selection, reduce production costs, and shorten the cycle time for product development.